| 具有表面二阶金属光栅的927nm分布反馈半导体激光器的研制 |
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| 引用本文： | 仕均秀,秦莉,叶淑娟,张楠,刘云,宁永强,佟存柱,曾玉刚,王立军.具有表面二阶金属光栅的927nm分布反馈半导体激光器的研制[J].光电子．激光,2011(10):1488-1491. |
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| 作者姓名： | 仕均秀 秦莉 叶淑娟 张楠 刘云 宁永强 佟存柱 曾玉刚 王立军 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室； 中国科学院研究生院；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室； 中国科学院研究生院；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室； 中国科学院研究生院；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室；;中国科学院长春光学精密机械与物理研究所激发态物理重点实验室； |
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| 基金项目： | 国家自然科学基金重点资助项目(90923037);国家自然科学基金资助项目(61006054) |
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| 摘 要： | 采用全息光刻和湿法腐蚀光栅技术，成功制备了表面二阶金属光栅宽条型分布反馈（DFB）半导体激光器，无需二次外延生长过程，实现了宽接触室温直流下大范围稳定单纵模工作。腔面未镀膜器件，在脉冲工作条件下，注入电流为2．28A时，单面输出功率大于600mW，斜率效率达0．37mW／mA，功率效率大于11％。在连续电流注入下，当注...
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| 关 键 词： | 宽条型分布反馈(DFB)激光器 表面二阶金属光栅 全息光刻 |
A 927nm distributed feedback laser with surface second-order metal grating |
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| SHI Jun-xiu,QIN Li,YE Shu-juan,ZHANG Nan,LIU Yun,NING Yong-qiang,TONG Cun-zhu,ZENG Yu-gang and WANG Li-jun.A 927nm distributed feedback laser with surface second-order metal grating[J].Journal of Optoelectronics·laser,2011(10):1488-1491. |
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| Authors: | SHI Jun-xiu QIN Li YE Shu-juan ZHANG Nan LIU Yun NING Yong-qiang TONG Cun-zhu ZENG Yu-gang and WANG Li-jun |
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| Affiliation: | Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China; Graduate School of the Academy of Sciences,Beijing 100039,China;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China; Graduate School of the Academy of Sciences,Beijing 100039,China;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China; Graduate School of the Academy of Sciences,Beijing 100039,China;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;;Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China; |
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| Abstract: | This paper reports a broad-area distributed feedback(DFB) laser with surface second-order metal grating,based on the holographic photolithography and wet etching technology without epitaxial regrowth process after the grating fabrication.At room temperature,for the uncoated device with a cavity length of 1 mm,the stable longitudinal single-mode emission around 927 nm has been achieved in a large current range.In pulsed operation,at a current of 2.28 A,the front facet output power is above 600 mW... |
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| Keywords: | broad-area distributed feedback(DFB) laser surface second-order metal grating holographic photolithography |
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