基于复合摆倒摆串联的光学仪器气浮隔振方法研究

为解决超精密光学仪器要求兼顾超低固有频率和超低振动速度的问题，提出了一种基于复合摆-倒摆串联的超低频气浮隔振方法。利用单摆和倒摆的水平刚度作用相反、相互抵消的特性，将二者串联，研制了能够与气浮隔振系统组合使用的复合摆-倒摆串联水平隔振装置，并对其进行了建模、仿真和实验分析。实验结果表明：采用本文提出的隔振方法，气浮隔振...

An air flotation vibration isolation method based on compond pendulum inverted pendulum-series for optical instruments

In order to solve the problem of ultra-precision optical instruments demanding both low natural frequency and low vibration speed,this paper proposes an ultra-low frequency air flotation vibration isolation method based on complex pendulum and inverted pendulum series.Based on the feature that the horizontal stiffnesses of simple pendulum and inverted pendulum can offset each other,we placed simple pendulum and inverted pendulum in series,and developed a complex pendulum and inverted pendulum se...