| 纳秒准分子激光合成制备TiN／AlN多层复合膜研究 |
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| 引用本文： | 唐普洪,裘信国,宋仁国.纳秒准分子激光合成制备TiN／AlN多层复合膜研究[J].光电子．激光,2011(10):1532-1536. |
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| 作者姓名： | 唐普洪 裘信国 宋仁国 |
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| 作者单位： | 嘉兴职业技术学院； 特种装备制造与先进加工技术教育部/浙江省重点实验室(浙江工业大学)；;特种装备制造与先进加工技术教育部/浙江省重点实验室(浙江工业大学)；;特种装备制造与先进加工技术教育部/浙江省重点实验室(浙江工业大学)； |
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| 基金项目： | 国家自然科学基金(50975259);嘉兴市科技计划(2009AY2007)资助项目 |
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| 摘 要： | 采用纳秒准分子激光在单晶硅试样表面制备了调制周期为50nm、调制比为2的TiN／AlN多层复合膜，并研究了N2分压对多层膜微结构和硬度的影响。结果表明，在低N2分压下薄膜表面颗粒相对较小，颗粒之间的空隙也不明显；随着N2分压的升高，薄膜表面颗粒明显粗化，且直径变大高度增高，颗粒之间孔隙变大。X射线衍射（XRD）研究表明...
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| 关 键 词： | 准分子激光 多层复合膜 TiN/AlN 晶粒尺寸 |
A study of TiN/AlN multi-layer composite film deposited by nanosecond excimer laser |
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| TANG Pu-hong,QIU Xin-guo and SONG Ren-guo.A study of TiN/AlN multi-layer composite film deposited by nanosecond excimer laser[J].Journal of Optoelectronics·laser,2011(10):1532-1536. |
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| Authors: | TANG Pu-hong QIU Xin-guo and SONG Ren-guo |
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| Affiliation: | Jiaxing Vocational & Technology College,Zhejiang Jiaxing 314036,China; Key Laboratory of Education Ministry of China,Zhejiang University of Technology,Hangzhou 310014,China;Key Laboratory of Education Ministry of China,Zhejiang University of Technology,Hangzhou 310014,China;Key Laboratory of Education Ministry of China,Zhejiang University of Technology,Hangzhou 310014,China |
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| Abstract: | In this study,polycrystalline TiN/AlN multi-layer composite films in various N2 partial pressures were deposited onto silicon substrate using the novel target by pulsed laser ablation.The results show that the microstructure,the grain size and the nanoindentation hardness of TiN/AlN multilayer films strongly depend on the N2 partial pressure.As the N2 partial pressure increasing,the energy of deposited particles and the mobility of the impinging particles are increased,which leads to the changes... |
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| Keywords: | nanosecond excimer laser multi-layer composite films TiN/AlN grain size |
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