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梯度掺杂结构GaN光电阴极的激活工艺研究
引用本文:李飙,徐源,常本康,王晓晖,杜玉杰,高频,张俊举.梯度掺杂结构GaN光电阴极的激活工艺研究[J].光电子.激光,2011(9):1317-1321.
作者姓名:李飙  徐源  常本康  王晓晖  杜玉杰  高频  张俊举
作者单位:南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;;南京理工大学电子工程与光电技术学院;
基金项目:国家自然科学基金资助项目(60871012)
摘    要:利用自行研制的光电阴极多信息量测试评估系统,在线测试了梯度掺杂结构GaN光电阴极在激活过程中的光电流、Cs源电流和O源电流。根据激活后的阴极光谱响应曲线和量子产额曲线,分析了超高真空室真空度、激活前的阴极表面净化程度、激活中首次进Cs量、激活中的Cs/O比以及Cs/O源在激活中的供给方式等对阴极激活的影响,提出了梯度掺...

关 键 词:梯度掺杂  GaN  光电阴极  激活工艺

Activation technique of gradient-doping GaN photocathode
LI Biao,XU Yuan,CHANG Ben-kang,WANG Xiao-hui,DU Yu-jie,GAO Pin and ZHANG Jun-ju.Activation technique of gradient-doping GaN photocathode[J].Journal of Optoelectronics·laser,2011(9):1317-1321.
Authors:LI Biao  XU Yuan  CHANG Ben-kang  WANG Xiao-hui  DU Yu-jie  GAO Pin and ZHANG Jun-ju
Affiliation:Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China;Institute of Electronic Engineering and Optoelectronic Technology,Nanjing University of Science and Technology,Nanjing 210094,China
Abstract:The data,such as photocurrents,currents of Cs source and O source in the activation process of gradient-doping GaN photocathode,were measured in the preparation and evaluation system designed by us.The effects of vacuum,surface cleaning,the first flux of Cs,Cs/O ratio,and Cs/O flux on/off were analyzed based on the curves of spectral response and quantum yield obtained by testing the gradient-doping GaN photocathode after being fully activated.The optimized activation technique of gradient-dopin...
Keywords:gradient-doping  GaN  photocathode  activation technique
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