B掺杂ZnO纳米薄膜的结构和光学特性研究

采用脉冲磁控溅射法制备了B掺杂ZnO(ZnO:B)纳米薄膜,并用X射线衍射(XRD)、扫描电子显微镜(SEM)和紫外-可见-近红外分光光度计分别研究了薄膜的结构和光学特性。结果表明:ZnO:B为多晶纳米薄膜,具有六方钎锌矿结构,且薄膜沿着c轴取向择优生长;在可见光和近红外光谱区的透光性能良好,其中在可见光区的平均透光率大于84%,而在近红外区的透光率随着波长增加而逐渐降低至45%。运用逐点无约束最优化法分析计算了薄膜的光学常数,在可见光区,ZnO:B纳米薄膜的光学常数随波长的变化很小且数值基本恒定,折射率约为2.0,而在紫外区,光学常数随波长的变化显著。

Structural and optical properties of nanostructured B-doped ZnO thin films

Nanostructured B-doped ZnO thin films were deposited by pulsed ma gnetron sputtering,and the structural and optical properties are investigated by X-ray diffraction (XRD) s canning electron microsope (SEM) and ultraviolet visible near infrared (UV-Vis -NIR) spectrometer,respectively.The results show that ZnO:B is a polycrystalline nanostructured thin film with hexag onal wurtzite structure,and is oriented along the c-axis preferential growth.It exhibits high optical transmit tan ce in both visible and near-infrared (NIR) spectral regions.The average transmittance is over 84% in visible spectral region,and decreases to 45% gradually in NIR spectral region.The pointwise unco nstrained optimization method is applied to calculate the optical constants of the film.The optical constants have little change with wav elength increasing in visible range and the value is substantially constant,and the refractive index is about 2.0, whereas the optical constants vary significantly in the UV region.