首页 | 本学科首页   官方微博 | 高级检索  
     

一种湿度传感器接口电路的分析与改进
引用本文:程坤,秦明,张中平,黄庆安.一种湿度传感器接口电路的分析与改进[J].微电子学,2005,35(6):647-650,654.
作者姓名:程坤  秦明  张中平  黄庆安
作者单位:东南大学,MEMS教育部重点实验室,江苏,南京,210096
基金项目:国家自然科学基金资助项目(60476019);江苏省自然科学基金资助项目(BK2003052)
摘    要:介绍了一种本实验室开发的集成湿度传感器,它实现了湿敏电容和接口电路在一块芯片上的集成。重点分析了它的接口电路,基于施密特触发器构建,实现电、容值与频率值的转换。对样片进行了测试,电容值与湿度值近似为线性关系;但是,输出波形的占空比与理论值有较大的偏差。通过分析,给出了测试结果发生偏差的原因。最后,对施密特触发器的参数进行优化,重新对电路的结构进行了设计,实现了与实验室第二代湿度传感器的集成。

关 键 词:MEMS  湿度传感器  接口电路  频率输出
文章编号:1004-3365(2005)06-0647-04
收稿时间:2005-03-11
修稿时间:2005-03-112005-05-13

Analysis and Improvement of an Interface Circuit for Humidity Sensor
CHENG Kun,QIN Ming,ZHANG Zhong-ping,HUANG Qing-an.Analysis and Improvement of an Interface Circuit for Humidity Sensor[J].Microelectronics,2005,35(6):647-650,654.
Authors:CHENG Kun  QIN Ming  ZHANG Zhong-ping  HUANG Qing-an
Affiliation:Key Laboratory of MEMS under Ministry of Education, Southeast University, Nanjing, Jiangsu 210096, P. R. China
Abstract:A new integrated humidity sensor is dealt with. The humidity-sensitive capacitance and the interface are integrated into one chip. The interface circuit, which is based on the Schmitt trigger, works as a capacitor-frequency converter. The capacitor and the relative humidity satisfied a linear relationship during testing, but the duty cycle of the output waveform displayed a large difference from theoretic calculation. The reason for the difference is analyzed. Circuit schematic and parameters are redesigned to realize the integration with a new humidity sensor designed in our laboratory.
Keywords:MEMS! Humidity sensor  Interface circuit  Frequency output
本文献已被 CNKI 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号