| 微悬臂梁在化学及生物传感器中的应用进展 |
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| 引用本文： | 王军军,谢海芬,周嘉,黄宜平.微悬臂梁在化学及生物传感器中的应用进展[J].微电子学,2004,34(5):493-496. |
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| 作者姓名： | 王军军 谢海芬 周嘉 黄宜平 |
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| 作者单位： | 复旦大学,微电子系,上海,200433 |
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| 基金项目： | 国家自然科学基金资助项目(30170266) |
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| 摘 要： | 微悬臂梁结构传感器以其低成本、小体积、高性能在当今传感器研完中愈来愈受到重视。文章概述了以微悬臂梁为主要结构的传感器在化学及生物探测中的应用进展，介绍了几种可能用于化学和生物探测的高性能微悬臂梁传感器。
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| 关 键 词： | MEMS 微悬臂梁 化学传感器 生物传感器 |
| 文章编号： | 1004-3365(2004)05-0493-04 |
Development of Microcantilever-Based Chemical and Biological Sensors |
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| WANG Jun-jun,XIE Hai-fen,ZHOU Jia,HUANG Yi-ping.Development of Microcantilever-Based Chemical and Biological Sensors[J].Microelectronics,2004,34(5):493-496. |
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| Authors: | WANG Jun-jun XIE Hai-fen ZHOU Jia HUANG Yi-ping |
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| Abstract: | The microcantilever sensor, due to its low-cost, small size and high performance, attracts more and more attention in the research and development of sensors in recent years. The development of chemical sensors and biosensors based on the microcantilever structure is reviewed in the paper. Also, several high-performance microcantilever sensors are described, which might have potential applications in chemical and biological sensing. |
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| Keywords: | MEMS Microcantilever Chemical sensor Biological sensor |
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