悬浮型石墨烯压力传感阵列的设计与研究

传统的硅压阻式压力传感器存在易受温度影响、断裂韧性较差以及传感节点有限等缺点,因此设计了一种悬浮型阵列结构的石墨烯压力传感器。首先分析了该传感器的结构与原理,然后研究了应变对石墨烯能带结构的影响。最后,建立了顶板-支柱结构的压强放大模型和挠度放大模型。理论与仿真结果表明,压强的放大系数与半径比满足负指数关系,随着支柱底面半径的不断减小,放大系数趋于定值；在集中压力模型中,最大挠度与半径比近似满足线性关系,最大挠度与压强呈三分之一幂次关系。

Design and Research on a Suspended Graphene Pressure Sensor Arrays

Traditional silicon piezoresistive pressure sensors have disadvantages such as susceptibility to temperature, poor fracture toughness and limited sensing nodes. Therefore, a graphene pressure sensor with the suspended array structure was designed in this paper. First of all, the structure and the principle of the sensor were analyzed, and then the strain effect on the band gap of graphene was studied. Finally, the pressure amplification model and the deflection amplification model of the roof-pillar structure were established. The theoretical and simulation results showed that the pressure amplification coefficient and the radius ratio met the negative exponential relationship. Specifically, as the radius of the pillar continued to decrease, the amplification coefficient tended to a constant value. In the concentrated pressure model, the maximum deflection and the radius ratio approximately satisfied the linear relationship, and the maximum deflection had a one-third power relationship with the pressure.