| 脉冲升压式准分子激光电源研究 |
| |
| 引用本文： | 黄德文,游利兵,梁勖,余吟山.脉冲升压式准分子激光电源研究[J].量子电子学报,2009,26(1):39-43. |
| |
| 作者姓名： | 黄德文 游利兵 梁勖 余吟山 |
| |
| 作者单位： | 中国科学院安徽光学精密机械所,安徽,合肥,230031 |
| |
| 摘 要： | 针对光刻用准分子激光器的激励技术,利用拉普拉斯变换方程对脉冲变压器高压充电过程进行了分析,验证了耦合系数于与压缩高压充电时间的重要作用.耦合系数越接近于1,高压充电时间越短.介绍了充电电路与磁开关结合后完成快放电的过程,并提出了一种控制谐振充电的方法.实现了对高压电容50μs内的快充电.
|
| 关 键 词： | 激光技术 脉冲升压式电源 拉普拉斯变换 高重复率 光刻 |
| 收稿时间： | 2008/3/20 |
Research on pulse charging excimer laser power supply |
| |
| HUANG de-wen,YOU li-bing,LIANG Xu,YU yin-shan.Research on pulse charging excimer laser power supply[J].Chinese Journal of Quantum Electronics,2009,26(1):39-43. |
| |
| Authors: | HUANG de-wen YOU li-bing LIANG Xu YU yin-shan |
| |
| Abstract: | Based on the exciting technology of excimer laser used for semiconductor lithography, the charging process of pulse transformer is analyzed using the Laplace formula. It is validated that the coupling factor influences the charging time. The charging time is compressed when the coupling factor is close to 1 The discharge process of charging circuit combined with magnetic switches is introduced. A scheme for controlling the resonant charging is also proposed. The power supply designed can fulfi11 the charge process in 50μs |
| |
| Keywords: | laser techniques pulse charging power supply Laplace transformation high-repetition semiconductor lithography |
| 本文献已被 万方数据 等数据库收录！ |
|
