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Q值对无源压力传感器无线信号传输的影响
引用本文:杨芳,梁庭,李凯丽,洪应平,熊继军.Q值对无源压力传感器无线信号传输的影响[J].微纳电子技术,2012,49(3):162-165,186.
作者姓名:杨芳  梁庭  李凯丽  洪应平  熊继军
作者单位:中北大学仪器科学与动态测试教育部重点实验室,太原,030051
基金项目:国家重点基础研究发展计划(973计划)资助项目(2010CB334703);国家自然科学基金资助项目(51075375)
摘    要:主要研究了无源压力传感器的无线信号传输性能。传感器结构由压力敏感电容空腔和电感天线组成,内部无需有源器件、电池等。通过压力敏感结构电感天线的金属层厚度、线宽等因素的改变来研究无线信号传输性能。经过实验测试,电感的品质因数Q对传感器的信号传输是有影响的。电感天线的金属层加厚、线宽加宽,可以减小电感的电阻,从而增大传感器电感的Q值,有利于无线信号的传输。

关 键 词:压力传感器  无线信号传输  Q值  金属层厚度  天线

Influence of Q-Factor on Wireless Signal Transmission of Passive Pressure Sensors
Yang Fang , Liang Ting , Li Kai-li , Hong Ying-ping , Xiong Ji-jun.Influence of Q-Factor on Wireless Signal Transmission of Passive Pressure Sensors[J].Micronanoelectronic Technology,2012,49(3):162-165,186.
Authors:Yang Fang  Liang Ting  Li Kai-li  Hong Ying-ping  Xiong Ji-jun
Affiliation:(Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China,Taiyuan 030051,China)
Abstract:The wireless signal transmission performance of the passive pressure sensor was mainly researched.The sensor structure consists of the pressure sensitive capacitance cavity and induc-tance antenna,and the interior of the sensor requires neither the active devices nor the battery.The performance of the wireless signal transmission was studied by changing the metal layer thickness and the line width of the inductance antenna for the pressure sensitive structure.The experimental tests show that the quality factor Q of the inductance influences the wireless signal transmission of the sensor.The resistance of the inductance is reduced by increasing the metal layer thickness and line width of the inductance antenna,thus the Q-factor of the inductance for the sensor is increased,which is good for the wireless signal transmission.
Keywords:pressure sensor  wireless signal transmission  Q-factor  metal layer thickness  antenna
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