基于原子力显微镜(AFM)的微小结构加工工艺研究

为了解决AFM单独用于机械刻蚀加工存在的局限性以及加工过程中各种因素对加工结果的影响等问题 ,提出一种基于AFM的非硅工艺微结构的加工方法。把三维微动工作台叠加到原子力显微镜工作台上组成新的微加工系统 ,采用金刚石针尖作为加工工具。根据AFM在线成像后的结果对该工艺过程中各种因素产生的影响进行了研究、分析和说明 ,得出主要参数优选的一般方法 ,讨论了与其他微机械加工方法相比较采用该方法的优缺点和可行性。应用该系统进行了微结构的加工实验 ,实验结果表明该系统能够实现较高尺寸精度和重复性精度的微结构的加工 ,并且通过优选参数改进工艺完全可以应用于微机械领域中诸如掩模或微尺度模具等简单和复杂的准三维或三维微小结构的加工

Study on the processing technique of microstructure based on AFM

In order to solve the problems including the limitation of the micro machining using AFM only and the influence of various factors on the results, a method of non silicon microstructure based on AFM is presented. A three dimension micro displacement stage is added to the stage of AFM, and a new micro system is established. In this system, a sharp diamond tip is used as the tool. The surface topography of the microstructure is monitored and imaged by AFM. According to the machined results, the influence of the factors during the process is studied, analyzed, and the usual method to optimize the parameters is obtained. The advantages and feasibility of this system compared with other micro fabrication methods are discussed. The experiment result indicates this system can realize the microstructure machining with high dimension accuracy and repeatability accuracy. And through optimizing the parameters to improve the process, this system is fit for the fabrication of simple or complicate microstructures, such as the mask, micro scale die, etc.