| 半导体微结构材料的发展 |
| |
| 作者单位： | The 13th Institute，Ministry of EI，Shijiazhuang，050051 |
| |
| 摘 要： | 超晶格的概念与先进的材料生长技术相结合产生了半导体微结构材料。目前，材料设计、材料生长和深微米技术的一体化，推动着半导体微结构材料向着低维化方向发展。
|
| 关 键 词： | 半导体，微结构材料 |
Development of Semiconductor Microstructure Materials |
| |
| Authors: | Guan Xingguo |
| |
| Abstract: | The semiconductor microstructure materials are emerged from theconcept of superlattice in combination with the advanced material growth tech-nology. At present the integration of material design, material growth and deepmicron technology are giving impetus to the semiconductor microstructure ma-terials to develop towards low dimension. |
| |
| Keywords: | Semiconductor Microstructure material |
| 本文献已被 CNKI 等数据库收录！ |
