| GaAs基共振隧穿微加速度计的研究 |
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| 引用本文： | 胡杰,薛晨阳,张文栋,熊继军,张斌珍.GaAs基共振隧穿微加速度计的研究[J].微纳电子技术,2007,44(7):235-237. |
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| 作者姓名： | 胡杰 薛晨阳 张文栋 熊继军 张斌珍 |
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| 作者单位： | 中北大学,电子测试技术国家重点实验室,太原,030051 |
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| 摘 要： | 研究了一种新型的GaAs基压阻式共振隧穿微加速度计结构。该微加速度计的压敏元件采用AlAs/In0.1Ga0.9As双势垒共振隧穿纳米薄膜结构。加速度计的压敏元件和悬臂梁的加工分别利用空气桥工艺和控制孔工艺。对加工出来的加速度计结构进行振动台实验，初步测得传感器的灵敏度为7.6mV/g，线性度为0.16%。
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| 关 键 词： | 加速度计 共振隧穿薄膜 双空气桥工艺 控制孔工艺 |
| 文章编号： | 1671-4776（2007）07/08-0235-03 |
| 修稿时间： | 2007-04-02 |
Research of a Micro Accelerometer Based on GaAs Resonant Tunneling Structure |
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| HU Jie,XUE Chen-yang,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen.Research of a Micro Accelerometer Based on GaAs Resonant Tunneling Structure[J].Micronanoelectronic Technology,2007,44(7):235-237. |
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| Authors: | HU Jie XUE Chen-yang ZHANG Wen-dong XIONG Ji-jun ZHANG Bin-zhen |
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| Affiliation: | National Key Laboratory for Electronic Measurement Technology ,North University of China, Taiyuan 030051 ,China |
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| Abstract: | A novel GaAs piezoresistive aecelerometer based on resonant tunneling structure was presented. The sensitive unit was made of AlAs/In0 1Ga0.9As double barriers resonant tunneling thin film. The sensing unit and cantilever beams were successfully fabricated by double air bridg- es process and control hole process separately. The sensitivity of 7. 6 mV/g and the linearty of 0. 16% were measured in the vibration experiment. |
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| Keywords: | accelerometer resonant tunneling thin film double airbridges technique control hole technique |
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