| CMOS二维风速计控制及检测电路的研究 |
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| 引用本文： | 程海洋,秦明.CMOS二维风速计控制及检测电路的研究[J].微纳电子技术,2004,41(6):38-43. |
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| 作者姓名： | 程海洋 秦明 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,江苏,南京,210096 |
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| 基金项目： | 江苏省“十五”高技术资助项目(BG2001035) |
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| 摘 要： | 针对CMOS二维风速风向传感器的工作原理,分析了传感器的控制电路及其特点,并根据该类传感器的特点,重点探讨了信号检测处理电路的形式和特点。拟采用恒温差或者温度平衡控制模式实现对加热器的控制,用斩波放大技术或热Σ-Δ调制技术构建信号处理电路,用标准CMOS工艺实现传感器和控制处理电路的系统集成。
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| 关 键 词： | 硅热流量传感器 风速计 CMOS工艺 斩波放大器 Σ-ΔADC |
| 文章编号： | 1671-4776(2004)06-0038-06 |
| 修稿时间： | 2003年12月3日 |
Study on the controlling and measuring circuits of the two-dimensional CMOS silicon wind sensor |
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| CHENG Hai-yang,QIN Ming.Study on the controlling and measuring circuits of the two-dimensional CMOS silicon wind sensor[J].Micronanoelectronic Technology,2004,41(6):38-43. |
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| Authors: | CHENG Hai-yang QIN Ming |
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| Abstract: | After a brief introduction of the operational principle,we focus on the working modes and the circuits that realize them as well as the signal sensing and managing circuits. We make some analyses of these working modes and those signal processing circuits and prefer the constant temperature difference(CTD)mode and the temperature balance(TB)mode,use the chopper amplifier or thermal Σ-Δ modulator to deal with the output signals of the thermopiles of the wind sensor,as well as integrate the wind sensor and its interface circuits as a whole system. |
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| Keywords: | silicon thermal flow sensor wind sensor CMOS process chopper amplifier Σ-Δ ADC |
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