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金刚石膜电极电化清洗中pH值的影响
引用本文:边永超,刘玉岭,张建新.金刚石膜电极电化清洗中pH值的影响[J].微纳电子技术,2007,44(11):1021-1025.
作者姓名:边永超  刘玉岭  张建新
作者单位:河北工业大学,微电子研究所,天津,300130
摘    要:利用硼掺杂金刚石膜电极在电解液中作阳极,通过控制各种相关条件使电解液中产生大量氢氧自由基和其他强氧化物质,将有机污染物氧化分解成小分子,甚至是CO2和H2O;同时配合专用清洗剂,极好地去除材料表面及狭缝中的固体颗粒和金属杂质,有效实现了被清洗表面的高度洁净化。通过实验分析了pH值的变化对电解液氧化性的影响,确定了最佳pH值为12.5。

关 键 词:金刚石膜电极  氢氧自由基  硼掺杂  pH值  清洗
文章编号:1671-4776(2007)11-1021-05
修稿时间:2007-05-22

Effects of pH Value on Electrochemical Cleaning with Diamond Film Electrode
BIAN Yong-chao,LIU Yu-ling,ZHANG Jian-xin.Effects of pH Value on Electrochemical Cleaning with Diamond Film Electrode[J].Micronanoelectronic Technology,2007,44(11):1021-1025.
Authors:BIAN Yong-chao  LIU Yu-ling  ZHANG Jian-xin
Affiliation:Microelectronics Institute, Hebei University of Technology, Tianjin 300130,China
Abstract:Using the boron-doped diamond film electrode as anode in the electrolyte,by the control some relatively conditions,it could generate large amounts of hydroxyl radicals and other powerful oxidant,which led to a very effective oxidation process,decomposed the organic contamination to little molecule,even CO2 and H2O.Further more,the method could clean out granules and metal effectively with the cooperation of special cleaning agents.The effects of pH value to the oxidation of electrolyte were analysed and the optimal pH value was 12.5 that was obtained by experimants.
Keywords:diamond film electrode  hydroxyl radicals  boron-doped  pH value  cleaning
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