SU-8胶双光子微加工分辨率与工艺条件研究

为了提高SU-8光刻胶的微加工分辨率,利用飞秒激光双光子聚合技术研究了SU-8光刻胶微加工时的加工工艺条件与分辨率之间的关系.实验在本研究组自主研制的纳米光子学超细微加工系统上进行,以钛蓝宝石飞秒激光器发出的780 nm波长激光作为加工光源,考察了不同激光功率与曝光时间等激光加工条件和后烤与无后烤等工艺条件对SU-8聚...

Resolution of SU-8 Photoresist in Two-Photon Polymerization Microfabrication and Research of Fabrication Conditions

In order to improve the microfabrication resolution of the SU-8 photoresist,the relationship between the fabrication conditions and resolution of the SU-8 photoresist was investigated by two-photon polymerization microfabrication technique.The two-photon polymerization experiments were performed on an own-made two-photon fabrication system through a Ti∶Sapphire femtosecond laser with the wavelength of 780 nm as the light source.The conditions inf-luences of the laser power,exposure time,post-baking and without post-baking on the profile and size of SU-8 polymer spots were studied.The minimum diameter of the fabricated dots is 0.22 μm on the condition of the post-baking process,but is 0.47 μm without the post-baking process.The experimental results show that the polymer spots with the smaller size can be achieved by the lower laser power and shorter exposure time,and the post-baking process is advantaged to reduce fabricating laser power and improve the resolution.The experimental results have a good agreement with the simulated analysis based on two-photon polymerization microfabrication theory.