| 微胶体推进器起始工作电压的估计方法研究 |
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| 引用本文： | 熊继军,周兆英,叶雄英,王晓浩.微胶体推进器起始工作电压的估计方法研究[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 熊继军 周兆英 叶雄英 王晓浩 |
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| 作者单位： | 清华大学精仪系 北京100084
(熊继军，周兆英，叶雄英)，清华大学精仪系 北京100084(王晓浩) |
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| 摘 要： | 提供了一种考虑到微制造工艺实际的对微胶体推进器的起始电压进行估计的方法。本方法的关键在于把基于深度干法腐蚀的微推进器的两极简化成一组双曲等势面中的两个 ,利用拉麦方程得到微推进器两极间静电场分布的近似解。进而分析微胶体推进器源极顶端工质液滴的静电力和表面张力的平衡 ,得到微胶体推进器的起始工作电压。按照工作电压的估计方程 ,基于ICP腐蚀 ,设计了 4种微胶体推进器。利用悬臂梁和电涡流微位移传感器对微推进器的测试结果表明 ,利用该方法对微胶体推进器起始电压进行的估计和实际测试结果有很好的一致性
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| 关 键 词： | 电场 起始工作电压 微胶体推进器 |
Evaluation of the onset voltage of a micro fabrication colloid thruster |
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| XIONG Ji jun,ZHOU Zhao ying,YE Xiong ying,WANG Xiao hao.Evaluation of the onset voltage of a micro fabrication colloid thruster[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | XIONG Ji jun ZHOU Zhao ying YE Xiong ying WANG Xiao hao |
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| Abstract: | The paper presents a methodology to estimate the onset voltage of a micro fabricated colloid thruster. The basic idea of this methodology is to simplify the source emitter and the extractor of the micro thruster as two hyperboloids of two sheets of a set of equal potential surface. A model used to estimate maximal electric field between electrodes is derived based on Lamé method. Four micro thrusters are developed utilizing the proposed estimation model, and the testing results on the micro thrusters agree with the estimation by the onset voltage equation with minimum errors. |
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| Keywords: | electric field onset voltage micro colloid thruster |
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