| MEMS-IDT声表面波陀螺 |
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| 引用本文： | 吕志清,胡爱民.MEMS-IDT声表面波陀螺[J].微纳电子技术,2003,40(4):27-29,33. |
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| 作者姓名： | 吕志清 胡爱民 |
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| 作者单位： | 四川压电与声光技术研究所,重庆,400060 |
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| 摘 要： | 声表面波陀螺的概念出现在70年代初期,发展为MEMS-IDT声表面波陀螺仅是最近几年的事情。MEMS-IDT声表面波陀螺仪是一种MEMS微机械振动陀螺,这种陀螺为单层平面结构,采用标准IC工艺就可完成加工,勿需悬浮的振动元件,有很强的抗冲击振动能力,可靠性高,可不用真空封装而保持较高的灵敏度。
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| 关 键 词： | MEMS 声表面波 叉指换能器 陀螺 驻波振动 |
| 文章编号： | 1671-4776(2003)04-0027-03 |
MEMS-IDT surface acoustic wave gyro |
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| Abstract: | The concept of SAW gyro was emerged in the first of the1970s,but MEMS-IDT SAW gyro has been just developed in recent years.MEMS-IDT SAW gyro is a type of MEMS gyro using standard IC technics.It has following characteristics:monolayer plane structure,no suspend vibrating element ,high resistibility with vibration and impact,high reliability,high sen-sitivity and no need of vaccum package. |
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| Keywords: | MEMS SAW IDT gyro standing-wawe vibration |
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