一种新型多定子直线型超声电机的研究

直线型超声电机具有可直接驱动、精度高、响应快、适用于真空环境等优点，但驱动力较小。为提高工作台的负载能力，该文提出并研制了一种多定子直线型超声电机。样机由两个定子和一个动子(与工作台台面相联)组成。定子是一个利用1阶纵振和2阶弯振、带双足的兰杰文振子，双足交替驱动。讨论了该电机的驱动机理，对定子的结构进行了优化设计，给出了定子、动子、工作台一体化的设计方案，并对电机的输出性能做了初步的实验研究。

Resarch on Multi-stator Linear Ultrasonic Motor

Linear ultrasonic motor takes advantages of direct drive?high precision and quick response. It is widely employed in high precision X-Y moving table, however, its driving force is relatively small. To increase the load ability of the moving table, we bring up a multi-stator linear ultrasonic motor, the prototype include two stators and a rotor. Firstly, this paper discusses its drive mechanism. Then we propose a optimized structure for the stator and suggest a unifinicationally designed scheme for the stator, rotor and moving table. Finally, mechanical characteristics of the prototype motor are tested.