| 高质量灵敏度声波传感器 |
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| 引用本文： | 李红浪,程利娜,刘久玲,王文,何世堂.高质量灵敏度声波传感器[J].压电与声光,2009,31(5). |
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| 作者姓名： | 李红浪 程利娜 刘久玲 王文 何世堂 |
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| 作者单位： | 中国科学院,声学研究所,北京,100080 |
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| 基金项目： | 国家自然科学基金资助项目 (10774159 |
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| 摘 要： | 压电晶体声波器件具有灵敏度高,体积小,价格低等独特优点,因而在气体和液体检测领域的应用前景广.该文首先介绍了多种不同类型的声波传感器的结构和特性,重点给出了几种具有高质量灵敏度的声波传感器,并进行了相应实验验证.
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| 关 键 词： | 声波 传感器 质量灵敏度 |
Acoustic Wave Sensors with High Mass Sensitivity |
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| LI Hong-lang,CHENG Li-na,LIU Jiu-ling,WANG Wen,HE Shi-tang.Acoustic Wave Sensors with High Mass Sensitivity[J].Piezoelectrics & Acoustooptics,2009,31(5). |
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| Authors: | LI Hong-lang CHENG Li-na LIU Jiu-ling WANG Wen HE Shi-tang |
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| Abstract: | Acoustic devices on the basis of piezoelectric crystals are promising technology for gas and liquid sensing application due to their remarkable characteristics including high sensitivity, impact size and low price. This paper firstly reviews various acoustic wave sensors configuration and characteristics, then focuses on several high mass sensitivity ones. Corresponding theoretical analysis of acoustic wave sensors and experimental results are presented. |
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| Keywords: | acoustic wave sensors mass sensitivity |
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