| 悬浮转子式微机械陀螺仪的研究进展 |
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| 引用本文： | 崔峰,陈文元,苏宇锋,吴校生.悬浮转子式微机械陀螺仪的研究进展[J].压电与声光,2005,27(3):243-246,253. |
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| 作者姓名： | 崔峰 陈文元 苏宇锋 吴校生 |
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| 作者单位： | 上海交通大学,微纳米科学技术研究院,微米/纳米加工技术国家级重点实验室,上海,200030 |
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| 基金项目： | 国家"八六三"计划资助项目(2002AA745120)，上海市科委资助项目 |
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| 摘 要： | 介绍了一种不同于振动式微机械陀螺仪的新型微机电系统陀螺一悬浮转子式微机械陀螺仪，并就国内外关于磁悬浮转子微陀螺和静电悬浮转子微陀螺研究的各种结构及其工作原理、工艺和性能特点进行了概述，以展示这一新颖微陀螺的研究现状和发展趋势。
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| 关 键 词： | 微机电系统 微机械陀螺 磁悬浮 静电悬浮 转子 |
| 文章编号： | 1004-2474(2005)03-0243-04 |
Research Status and Development of Micromachined Rotational Gyroscopes with Levitating Rotor |
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| CUI Feng,CHEN Wen-yuan,SU Yu-feng,WU Xiao-sheng.Research Status and Development of Micromachined Rotational Gyroscopes with Levitating Rotor[J].Piezoelectrics & Acoustooptics,2005,27(3):243-246,253. |
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| Authors: | CUI Feng CHEN Wen-yuan SU Yu-feng WU Xiao-sheng |
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| Abstract: | Differing from micromachined vibratory gyroscopes, a new type of MEMS gyroscope, a micromachined rotational gyroscope with levitating rotor, is described. By summarizing most results on electromagnetically levitated rotational gyroscopes and electrostatically levitated rotational gyroscopes developed in the world, this paper presents the respective characteristics of various structures, including their operating principles, fabrication processes and performances. Hence the research status and development of this novel micromachined gyroscope is outlined. |
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| Keywords: | MEMS Micromachined gyroscope electromagnetic levitation electrostatic levitation rotor |
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