| 二维硅微机械陀螺的研究 |
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| 引用本文： | 毛旭,刘宇,汪银年,丁明清,张福学.二维硅微机械陀螺的研究[J].压电与声光,2007,29(3):298-301. |
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| 作者姓名： | 毛旭 刘宇 汪银年 丁明清 张福学 |
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| 作者单位： | 1. 北京信息工程学院,传感技术研究中心,北京,100101
2. 北京真空电子技术研究所,北京,100016 |
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| 基金项目： | 国家自然科学基金;北京市重点实验室基金 |
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| 摘 要： | 报道了一种依靠载体的旋转作为驱动,能敏感载体偏航角速度与自转角速度的二维硅微机械陀螺的原理、硅摆制作、敏感元件封装和检测。分别用仿真器和速率转台对其二维特性进行测试,结果证实该硅微机械陀螺能够敏感旋转载体的偏航和旋转体自身的角速度,比例系数随旋转角速度增加而增加。陀螺性能测试说明这种陀螺达到中等精度的使用要求。
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| 关 键 词： | 二维硅微机械陀螺 偏航角速度 旋转角速度 |
| 文章编号： | 1004-2474（2007）03-0298-04 |
| 修稿时间： | 2006-04-19 |
Research on Two-dimensional Silicon Micro-machined Gyroscope |
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| MAO Xu,LIU Yu,WANG Yin-nian,DING Ming-qing,ZHANG Fu-xue.Research on Two-dimensional Silicon Micro-machined Gyroscope[J].Piezoelectrics & Acoustooptics,2007,29(3):298-301. |
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| Authors: | MAO Xu LIU Yu WANG Yin-nian DING Ming-qing ZHANG Fu-xue |
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| Affiliation: | 1. Research Centre of Sensor Technology, Beijing Information Technology Institute Beijing 100101, China; 2. Beijing Vacuum Electronics Research Institute Beijing 100016, China |
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| Abstract: | This paper presents a novel type of two-dimensional silicon micro-machined gyroscope that is driven by the rotating carrier.The theory,fabrication process of Si pendulum,fabrication process of the sense element,measurement results are described.The two-dimensional performance of the rotating carrier are measured at emulator and rotating table.The proportional coefficient increase with the increase in rotating rate of the emulator.Results show that the gyroscope can be used to sense the yawing and rotating angular rate of the rotating carrier with a medium precision. |
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| Keywords: | two-dimensional silicon micro-machined gyroscope yawing angular rate rotating angular rate |
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