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声表面波化学战剂气体传感器的研究
引用本文:马晋毅,江洪敏,李燕,杨靖.声表面波化学战剂气体传感器的研究[J].压电与声光,2008,30(5).
作者姓名:马晋毅  江洪敏  李燕  杨靖
作者单位:四川压电与声光技术研究所,重庆,400060
摘    要:介绍了声表面波气体传感器的基本工作原理和设计方法,通过SAW芯片拓扑结构、敏感膜、覆膜工艺和信号处理电路等方面的优化,研制出两种SAW化学战剂气体传感器,具有灵敏度高、响应和解吸附快,抗干扰能力强的特点。

关 键 词:声表面波  化学战剂  传感器

Study on SAW Gas Sensor for Chemical Warfare Agent
MA Jin-yi,JIANG Hong-min,LI Yan,YANG Jing.Study on SAW Gas Sensor for Chemical Warfare Agent[J].Piezoelectrics & Acoustooptics,2008,30(5).
Authors:MA Jin-yi  JIANG Hong-min  LI Yan  YANG Jing
Abstract:The fundamental theory and design method of surface acoustic wave(SAW) toxic gas sensor were introduced in this paper.Two kinds of SAW gas sensor were fabricated by optimizing SAW chip topology,sensitive polymer,coating technics and the signal processing circuit with high sensitivity,short adsorption/restoration time and good high anti-disturbance ability.
Keywords:surface acoustic wave(SAW)  chemical warfare agent  sensor
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