| 石英微机械陀螺敏感芯片的抗振动分析与改进 |
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| 引用本文： | 李文蕴,林日乐,满欣.石英微机械陀螺敏感芯片的抗振动分析与改进[J].压电与声光,2015,37(4):554-557. |
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| 作者姓名： | 李文蕴 林日乐 满欣 |
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| 作者单位： | （1.中国电子科技集团公司第二十六研究所，重庆 400060；,2.重庆市固态惯性技术企业工程技术研究中心，重庆401332；,3.重庆市固态惯性技术工程实验室，重庆401332） |
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| 基金项目： | 重庆市青年科技人才培养计划基金资助项目(cstc2014kjrc qnrc40003) |
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| 摘 要： | 石英微机械陀螺是振动惯性器件,而陀螺敏感芯片结构的抗振动能力会直接影响陀螺的性能。由于工作环境的振动会对陀螺的性能产生一定的影响,因此需提高陀螺敏感芯片结构的抗振动能力。该文利用有限元仿真软件对敏感芯片结构进行随机振动仿真分析,通过对敏感芯片结构的优化,提高了陀螺的抗振动能力。
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| 关 键 词： | 石英微机械 陀螺 随机振动 有限元 |
Analysis and Improvement of Anti Vibration Characteristic for the Sensitive Chip of Quartz MEMS Gyroscope |
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| LI Wenyun,LI Rile,and MAN Xin.Analysis and Improvement of Anti Vibration Characteristic for the Sensitive Chip of Quartz MEMS Gyroscope[J].Piezoelectrics & Acoustooptics,2015,37(4):554-557. |
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| Authors: | LI Wenyun LI Rile and MAN Xin |
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| Affiliation: | (1.26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;,2.Solid Inertial Technology Enterprise Engineering Technology Research Center of Chongqing City,Chongqing 401332,China; and 3.Solid Inertial Technology Engineering Lab. of Chongqing City,Chongqing 401332,China) |
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| Abstract: | Quartz MEMS gyroscope is vibrating inertial devices. And the anti vibration ability of sensitive chip directly affects the performance of the gyro.Because the performance of gyroscope may be impacted by the vibration working environment,the ability of anti vibration for sensitive chip of gyroscope has to be improved.The random vibration simulation analysis of the sensitive chip structure has been carried out by using the finite element simulation software.The anti vibration ability of the sensitive chip has been improved through optimizing the sensitive chip structure. |
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| Keywords: | quartz MEMS gyroscope random vibration finite element |
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