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基于RCWA方法设计的甲醛传感器的研究
引用本文:黄子吉,白忠臣,任哲毅,王宝,陆安江.基于RCWA方法设计的甲醛传感器的研究[J].压电与声光,2018,40(3):389-394.
作者姓名:黄子吉  白忠臣  任哲毅  王宝  陆安江
作者单位:(1.贵州大学 大数据与信息工程学院,贵州 贵阳 550025;2.贵州省光电子技术及应用重点实验室,贵州 贵阳 550025)
基金项目:国家科技支撑计划基金资助项目(2015BAK28B02);国家国际合作专项基金资助项目(2014DFA00670);贵州省科技重大专项基金资助项目(黔科合重字[2016]3022号)
摘    要:针对日常生活中甲醛损害人们健康的问题,该文采用严格耦合波分析(RCWA)法设计了一种能快速、高精度实时检测甲醛溶液浓度的光学传感器。该传感器以多孔二氧化锆(ZrO2)介孔材料作为甲醛的承载单元,TiO2和SiO2光栅分别作为波导层和光耦合层构成的层状复合结构。利用RCWA法计算了该传感器的透射光谱,建立了透射共振峰波长与待测甲醛溶液浓度间的关系模型,并分析了其传感特性。结果表明,该传感器具有较高的灵敏度和良好的重复稳定性,品质因数Q=1 261,灵敏度可达0.101 nm/%,并可实现对待测甲醛溶液浓度的实时动态监测。

关 键 词:光学传感器  甲醛溶液  严格耦合波分析法(RCWA)  透射光谱  传感特性

Study on Formaldehyde Sensor Based on RCWA Method
HUANG Ziji,BAI Zhongchen,REN Zheyi,WANG Bao,LU Anjiang.Study on Formaldehyde Sensor Based on RCWA Method[J].Piezoelectrics & Acoustooptics,2018,40(3):389-394.
Authors:HUANG Ziji  BAI Zhongchen  REN Zheyi  WANG Bao  LU Anjiang
Affiliation:(1.College of Big Data and Information Engineering, Guizhou University, Guiyang 550025,China; 2. Key Lab of Optoelectronic Technology and Application Guizhou Province,Guiyang 550025,China)
Abstract:Aiming at the problem that the formaldehyde damages human health in daily life, an optical sensor capable of detecting the concentration of formaldehyde solution rapidly and accurately in real time is designed by using the rigorous coupled wave analysis (RCWA) method. The sensor uses the porous zirconia (ZrO2) mesoporous material as the bearing unit of formaldehyde,and the titanium dioxide (TiO2) and silicon dioxide (SiO2) gratingsact as a layered composite structure composed of a waveguide layer and an optical coupling layer respectively.The transmission spectrum of the sensor is calculated by RCWA method. The relationship model between the wavelength of the transmission resonance peak and the concentration of the formaldehyde solution to be measured is established and its sensing characteristics are analyzed. The results show that the sensor has high sensitivity and good repeatablestability, the quality factor Q is 1 261, the sensitivity is up to 0.101 nm/%, and the real time dynamic monitoring of the concentration of formaldehyde solution can be realized.
Keywords:optical sensor  formaldehyde solution  rigorous coupled wave analysis (RCWA)method  transmission spectrum  sensing characteristic
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