MEMS加速度计混合误差标定补偿方案

针对微机电系统(MEMS)加速度计在实际使用过程中存在非正交零偏误差和温度漂移误差的问题，提出了一种混合误差标定补偿算法。算法通过分析加速度计温度与误差的关系，在不同温度区间下建立加速度计输出的误差模型，在每个温度区间采用十二位置校准法对加速度计的非正交零偏误差进行标定补偿，得到精确的零偏和刻度因子，同时采用最小二乘法拟合零偏和刻度因子与温度的一维关系函数，最终实现不同温度区间下的动态误差补偿。实验结果表明，本算法可使加速度计输出的精度提高1个数量级，补偿效果明显。

A Mixing Error Calibration and Compensation Scheme for MEMS Accelerometer

Aiming at the problems of non orthogonal zero bias error and temperature drift error in the practical use of MEMS accelerometer,a hybrid error calibration compensation algorithm was proposed in this paper.By analyzing the relationship between the accelerometer temperature and error, the error model of the accelerometer output at different temperature intervals was established.The 12 position calibration method was used to calibrate and compensate the non orthogonal zero bias error of the accelerometer in each temperature interval to obtain accurate zero bias and scale factor.At the same time,the least squares method was used to fit the one dimensional relationship function among the zero bias and scale factor and temperature, and finally the dynamic error compensation under different temperature ranges was realized.The experimental results show that the proposed algorithm can increase the accuracy of the accelerometer output by one order of magnitude, and the compensation effect is obvious.