LGS声表面波双模温度传感器研究

该文研究了基于硅酸镓镧（La3Ga5SiO14，LGS）压电衬底的声表面波(SAW)谐振器的瑞利波模式谐振频率和体声波模式谐振频率的温度特性，并利用这两种模式构建了一种宽温度范围的具有线性输出特性的温度传感器。研究结果表明，基于LGS衬底的谐振器的瑞利波模式和体波模式的谐振频率均与温度成二次函数关系，且二阶频率温度系数接近，利用此特性构建的双模温度传感器测试结果和热电偶测试结果基本一致。该文提出的这种双模温度传感器可获得全温度范围的线性输出特性，可应用于LGS高温SAW温度传感器。

Dual-mode SAW Temperature Sensor Based on LGS

The temperature characteristics of the Rayleigh wave mode resonant frequency and the bulk acoustic wave mode resonant frequency of SAW resonators based on La3Ga5SiO14 (LGS) piezoelectric substrate were studied in this work. Based on these two modes, a dual mode temperature sensor with wide temperature range and linear output characteristic was proposed. The results show that the resonance frequencies of both the Rayleigh wave mode and the bulk wave mode of the LGS resonator are a quadratic function of temperature. And the second order frequency temperature coefficients of these two resonance modes are nearly equal. The temperature measured by the proposed dual mode temperature sensor is the same as that measured by the thermocouple. The dual mode temperature sensor proposed in this work has linear output characteristic in the whole temperature range and can be used in the high temperature SAW temperature sensor based on LGS.