| 微机械叉指换能器声表面波陀螺 |
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| 引用本文： | 马晋毅.微机械叉指换能器声表面波陀螺[J].压电与声光,2003,25(6):442-444. |
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| 作者姓名： | 马晋毅 |
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| 作者单位： | 天津大学,电信学院微电子系,天津,300072;四川压电与声光技术研究所,重庆,400060 |
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| 摘 要： | 回顾了声表面波(SAW)陀螺发展史，总结了声表面波陀螺设计思想的变迁，重点介绍了一种新型微机械-叉指换能器(MEMS—IDT)声表面波陀螺。它具有适合标准IC工艺生产的简单二维结构，具备体积小、成本低、便于批量生产以及不用真空封装的特点。由于没有普通微机械陀螺的悬浮机构，抗冲击及振动的能力较普通微机械陀螺显著提高。同时，提出了一些迫待解决的问题。
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| 关 键 词： | 微机械-叉指换能器（MEMS—IDT） 声表面波（SAW） 陀螺 |
| 文章编号： | 1004-2474(2003)06-0442-03 |
| 修稿时间： | 2003年6月26日 |
MEMS-IDT Gyroscope Based on SAW |
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| MA Jin-yi.MEMS-IDT Gyroscope Based on SAW[J].Piezoelectrics & Acoustooptics,2003,25(6):442-444. |
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| Authors: | MA Jin-yi |
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| Abstract: | In addition to reviewing the transition of design method of SAW-based gyroscope, this paper introduced emphatically a new style SAW-based MEMS-IDT gyroscope. It has a two-demension planar structure fitting for standard IC procedure, with no suspended resonating mechanical structure giving rise to inherent robustness and shock resistance comparing other MEMS gyroscope. It also has many advantages such as small size, low cost, no vacuum packaging. At the same time, some issues to be solved are proposed. |
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| Keywords: | MEMS-IDT surface acoustic wave(SAW) gyroscope |
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