首页 | 本学科首页   官方微博 | 高级检索  
     

纳米定位控制中消除PZT滞后及蠕变的方法
引用本文:吴一辉,王立鼎.纳米定位控制中消除PZT滞后及蠕变的方法[J].压电与声光,1996,18(3):207-211.
作者姓名:吴一辉  王立鼎
作者单位:中科院长春光学精密机械研究所
摘    要:总结了近年来用PZT致动器进行纳米线性定位控制的方法,对其特点和局限性进行了分析,并提出了一种可望在较大行程范围内获得亚纳米定位分辨率的方法。

关 键 词:PZT致动器,纳米定位,滞后,蠕变

Ways to Eliminate Hysteresis and Creep in Nano-positioning
Wu Yihui,Wang Liding.Ways to Eliminate Hysteresis and Creep in Nano-positioning[J].Piezoelectrics & Acoustooptics,1996,18(3):207-211.
Authors:Wu Yihui  Wang Liding
Abstract:PZT actuator controlled by applied voltage has some undesirsble characterestics,such as hysteresis and creep.Hysteresis degrades the repeatability and creep downs the response to sudden change of voltage in ultra-precision positioning.A number of methods to reduce the nonlinearity were summarized and their limitations were analyzed in this paper.A better positioning system which can achieve nano-resolution, 10 nm position accuracy and good linearity was proposed.In this system,both amplifying and reducing mechanisms were used tO enhance the sensor sensitivity and the position resolution f the PZT actuator was controlled by applied voltage and the error is detected by a capacitance micrometry.
Keywords:PZT actuator  nano-positioning  hysteresis  creep
本文献已被 CNKI 维普 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号