| LiNbO_3单晶薄膜体声波谐振器的研制 |
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| 引用本文： | 彭霄,田本朗,毛世平,杜波,蒋欣,徐阳,马晋毅,蒋平英.LiNbO_3单晶薄膜体声波谐振器的研制[J].压电与声光,2019,41(3):330-334. |
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| 作者姓名： | 彭霄 田本朗 毛世平 杜波 蒋欣 徐阳 马晋毅 蒋平英 |
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| 作者单位： | （中国电子科技集团公司第二十六研究所，重庆 400060） |
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| 摘 要： | 该文介绍了一种采用智能截割(Smart Cut~(TM))技术制备的单晶铌酸锂(LiNbO_3)薄膜体声波谐振器。采用COMSOL有限元仿真软件从材料和结构两方面对LiNbO_3薄膜体声波谐振器进行优化设计,以实现高机电耦合系数,并通过Smart Cut~(TM)工艺方法制备了高性能Z切-LiNbO_3单晶薄膜作为谐振器的压电层,最终得到LiNbO_3薄膜体声波谐振器的谐振频率为3 847.5 MHz,反谐振频率为3 986.25 MHz,插入损耗为1.81 dB,谐振器有效机电耦合系数达到8.3%。
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| 关 键 词： | 机电耦合 智能截割 铌酸锂(LiNbO_3)单晶薄膜 薄膜体声波谐振器 |
Development of LiNbO_3 Single Crystal Thin Film Bulk Acoustic Resonator |
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| PENG Xiao,TIAN Benlang,MAO Shiping,DU Bo,JIANG Xin,XU Yang,MA Jinyi,JIANG Pingying.Development of LiNbO_3 Single Crystal Thin Film Bulk Acoustic Resonator[J].Piezoelectrics & Acoustooptics,2019,41(3):330-334. |
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| Authors: | PENG Xiao TIAN Benlang MAO Shiping DU Bo JIANG Xin XU Yang MA Jinyi JIANG Pingying |
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| Affiliation: | (The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China) |
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| Abstract: | The single crystal lithium niobate (LiNbO3) thin film bulk acoustic resonator (FBAR) fabricated by Smart Cut TM technology is introduced in this paper. The COMSOL finite element simulation (FEM) software is used to optimize the material and structure of LiNbO3 thin film FBAR in order to achieve high electromechanical coupling coefficient. A high performance Z cut LiNbO3 thin film is fabricated as the piezoelectric layer of the resonator by Smart Cut TM technology. The resulting LiNbO3 thin film bulk acoustic resonator has a resonant frequency of 3 847.5 MHz and an anti resonant frequencies of 3 986.25 MHz, an insertion loss of 1.81 dB, and an effective electromechanical coupling coefficient of 8.3%. |
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| Keywords: | electromechanical coupling Smart Cut TM LiNbO3 single crystal film thin film bulk acoustic resonator |
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