| 先进微陀螺器件及微惯性测量单元最新研究进展 |
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| 引用本文： | 何杰,朴继军,朱玲瑞,袁小平,胡少勤.先进微陀螺器件及微惯性测量单元最新研究进展[J].压电与声光,2019,41(3):410-415. |
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| 作者姓名： | 何杰 朴继军 朱玲瑞 袁小平 胡少勤 |
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| 作者单位： | (1.中国电子科技集团公司第二十六研究所，重庆 400060；2. 中国电子科技集团公司第四十四研究所，重庆 400060) |
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| 摘 要： | 微纳加工技术与振动惯性技术的结合使惯性仪表技术发生了重大的变革,拓展了惯性技术在军用和民用领域的应用。高性能微惯性器件对军事装备和国民经济的发展起着越来越大的作用。该文基于美国国防高级研究计划局(DARPA)近年来在微惯性传感器技术领域的资助项目,综合研究了微机电系统(MEMS)谐振陀螺、微光学陀螺(MOG)、声表面波(SAW)陀螺等微惯性传感器技术及微惯性测量单元的最新发展现状,并对其发展面临的技术挑战进行了详细地分析与评述。
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| 关 键 词： | 微纳加工技术 微陀螺 微半球谐振陀螺 微光学陀螺 声表面波(SAW)陀螺 微惯性测量单元 |
Recent Research Progress of Advanced Micro-gyroscope Devices and MIMU |
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| HE Jie,BU Jijun,ZHU Lingrui,YUAN Xiaoping,HU Shaoqin.Recent Research Progress of Advanced Micro-gyroscope Devices and MIMU[J].Piezoelectrics & Acoustooptics,2019,41(3):410-415. |
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| Authors: | HE Jie BU Jijun ZHU Lingrui YUAN Xiaoping HU Shaoqin |
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| Affiliation: | (1.The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China;
2. The 44th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China) |
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| Abstract: | The combination of micro/nano processing technology and vibration inertial technology has brought about major changes in inertial instrumentation technology, greatly expanding the application of inertial technology in military and civilian applications. High performance micro inertial devices are playing an increasingly important role in the development of military equipment and the national economy. Based on the recent support programs of the defense advanced research projects agency (DARPA) in the field of micro inertial sensor technology in recent years, the latest development status of micro inertial sensor technology, such as milli hemispherical resonator gyro (m HRG), micro optical gyroscope (MOG), SAW gyroscope and MIMU, is comprehensively studied in this work. The technical challenges faced by their developments are analyzed and reviewed. |
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| Keywords: | micro/nano processing technology micro gyroscope milli hemispherical resonator gyro (m HRG) micro optical gyroscope (MOG) SAW gyroscope MIMU |
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