| 水平式隧穿磁强计表头的制作 |
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| 引用本文： | 汤学华,何洪涛,罗蓉,李倩,郭荣辉,吝海峰.水平式隧穿磁强计表头的制作[J].压电与声光,2006,28(1):48-50. |
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| 作者姓名： | 汤学华 何洪涛 罗蓉 李倩 郭荣辉 吝海峰 |
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| 作者单位： | 1. 清华大学,精密仪器与机械学系,北京,100084
2. 河北半导体研究所,微米/纳米中心,河北,石家庄,050051 |
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| 基金项目： | 微米纳米加工技术国家重点实验室基金资助 |
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| 摘 要： | 水平式隧穿磁强计是一种新型隧穿磁强计,其特点是反映磁场变化的洛伦兹力与敏感元件在同一水平面内。该文介绍了这种隧穿磁强计的工作原理,分析了与垂直式隧穿磁强计的区别。给出了表头的加工版图、加工工艺及相应的工艺简图,分析了工艺难点。介绍了按此工艺研制的两种表头:一为直梁式,其加工相对容易、可靠性高;另一种为折叠梁式,其弹性好,位移灵敏度高。SEM照片显示:结构平整、无毛刺。两种结构的表头均进行了封装。
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| 关 键 词： | 磁强计 微机电系统 加工工艺 隧穿效应 |
| 文章编号： | 1004-2474(2006)01-0048-03 |
| 收稿时间： | 2004-03-29 |
| 修稿时间： | 2004年3月29日 |
The Manufacture of the Header of Horizontal Tunneling Magnetometer |
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| TANG Xue-hua,HE Hong-tao,LUO Rong,LI Qian,GUO Rong-hui,LIN Hai-feng.The Manufacture of the Header of Horizontal Tunneling Magnetometer[J].Piezoelectrics & Acoustooptics,2006,28(1):48-50. |
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| Authors: | TANG Xue-hua HE Hong-tao LUO Rong LI Qian GUO Rong-hui LIN Hai-feng |
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| Affiliation: | 1 . Dept. of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; 2. Micro/Nano Center, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
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| Abstract: | Horizontal tunneling magnetometer is a new kind of tunneling magnetometer in which Lorentz force is in the same level of sensitive element.In this essay,first of all,the operating principle of this kind of magnetometer is introduced and differences between this kind of magnetometer and vertical tunneling magnetometer are analyzed.Then the artwork and the fabrication process are supplied and the difficulty of the process is analyzed.Two kinds of the headers of horizontal tunneling magnetometer based on this process are introduced as well,one with straight movable girders,the other with folding movable girders.Finally the essay also shows that the structure of the headers,both of which are sealed,proves to be smooth and without burr by the SEM photos. |
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| Keywords: | magnetometer MEMS fabrication process tunnel effectv |
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