超磁致伸缩微驱动器在纳米测量中应用的研究

Ｘ射线衍射仪是目前纳米检测中最为行之有效的一种方法，对纳米技术的发展有着重要的意义。但是，目前由于受其驱动器性能的影响，在应用推广上还受到一定的限制。针对这一问题，文章提出采用超磁致伸缩材料，研制的驱动器具有位移量大、分辨率高、结构简单等特点，将其应用于Ｘ射线衍射仪中，将对其发展起着极大的推动作用。

Application of Giant Magnetostrictive Ac tuator in Nanometer Detection

X-ray interferometry is the most effective method of nanometre (NM) calibration at present, it is very significant to the development of nanotechnology. But,being influenced by the function property of its actuator,there is certain limitation in its applications and dissemination at the moment. In view of this problem,employing giant magnetostrctive materials to construct the base of the micro-position is proposed in this paper. The actuator described here has the characteristics of bigger displacement range,higher resolution and simplerstructure. The application of this actuator in the X-ray interferometer will promote its development greatly.