采用钯镍薄膜的声表面波氢气传感器研究

该文对采用钯镍薄膜作为敏感膜的声表面波氢气传感器开展研究,以实现快速的氢气检测。传感器采用双通道差分振荡器结构,其中在传感通道器件声表面波传播路径上以磁控溅射法沉积钯镍薄膜,通过钯镍薄膜对氢气的快速和可逆物理吸附引起声表面波传播速度的变化,进而以差分振荡器频率信号来表征待测氢气浓度。通过传感实验以确定获得快速响应的钯镍的优化厚度。结果表明,在钯镍厚为40nm时,传感器获得的响应幅度与响应速度分别达5kHz和5s。

Surface Acoustic Wave Hydrogen Gas Sensor Based on Pd-Ni Thin Film

In this paper, the surface acoustic wave hydrogen sensor using Pd Ni thin film as sensing film was studied to realize rapid detection of hydrogen gas. The sensor adopts a two channel differential oscillator structure, in which the Pd Ni thin film was deposited by magnetron sputtering method on the surface acoustic wave propagation path of the sensing channel device. The rapid and reversible physical adsorption of hydrogen by Pd Ni thin films result in the change of surface acoustic wave propagation velocity, and then the frequency signal of the differential oscillator is used to characterize the hydrogen concentration to be measured. The sensing experiments have been carried out to determine the optimum thickness of Pd Ni for rapid response. The results show that the response amplitude and response time of the sensor are 5 kHz and 5 seconds respectively when the thickness of Pd Ni is 40 nm.