| 水平式隧穿磁强计的建模与仿真 |
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| 引用本文： | 汤学华,尤政,杨拥军.水平式隧穿磁强计的建模与仿真[J].压电与声光,2005,27(5):566-568. |
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| 作者姓名： | 汤学华 尤政 杨拥军 |
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| 作者单位： | [1]清华大学精密仪器与机械学系,北京100084 [2]河北半导体研究所微米／纳米中心,河北石家庄050051 |
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| 基金项目： | 微米纳米加工技术国家重点实验室基金资助项目 |
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| 摘 要： | 隧穿磁强计是一种基于量子力学中隧道效应原理的新型磁强计，该文给出了两种隧穿磁强计方案，一种是洛伦次力方向和敏感元件平面相互垂直的垂直式方案，另一种是洛伦次力方向和敏感元件平面相互重合的水平式方案，分析了垂直式方案的加工难点。建立了水平式隧穿磁强计的敏感元件——质量弹簧系统的模型，推导了系统刚度和1阶固有频率的计算式，应力仿真图、静力变形仿真图和1阶振型仿真图均符合设计要求，结果证明模型是正确的。
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| 关 键 词： | 隧穿效应 磁强计 微机电系统 有限元 |
| 文章编号： | 1004-2474(2005)05-0566-03 |
| 收稿时间： | 2003-12-20 |
| 修稿时间： | 2003年12月20 |
The Modelization and Simulation of the Horizontal Tunneling Magnetometer |
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| TANG Xue-hua ,YOU Zheng ,YANG Yong-jun.The Modelization and Simulation of the Horizontal Tunneling Magnetometer[J].Piezoelectrics & Acoustooptics,2005,27(5):566-568. |
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| Authors: | TANG Xue-hua YOU Zheng YANG Yong-jun |
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| Affiliation: | 1. Dept. of Precision Instruments and Mechanology, singhua University, Beijing 100084, China; 2. Micro/Nano Center, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
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| Abstract: | Turmeling magnetometer is a kind of new magnetometer based on tunnel effect in quantum mechanics. This paper offers two projects of tunneling magnetometer. One is vertical project in which Lorentz force is vertical to the level of sensitive element, and the other is horizontal project in which Lorentz force is in the same level of sensitive element. We discussed the difficulties to fabricate the vertical tunneling magnetometer in this paper. The mass-spring system, which is the sensitive element of horizontal tunneling magnetometer, was modeled. Equations of first-order resonance frequency and stiffness of the system were setup. The emulation charts of stress, static force deformation and first-order mode of vibration all meet the demand of design; thus the result shows that the model is correct. |
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| Keywords: | tunnel effect magnetometer MEMS finite element |
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