MOEMS压力传感器的研究进展

微型光机电系统(MOEMS)技术作为一门新兴的技术,已广泛应用于光通信、光显示、数据存储和光学传感等诸多方面,而利用这种技术制作的光学压力传感器更是具有传统压力传感器无法比拟的优点.本文着重介绍了各类MOEMS压力传感器的结构、工作原理以及制作工艺,最后简要介绍了MOEMS压力传感器阵列的结构和制作工艺.

Advances in the Research on MOEMS Pressure Sensors

As a new technology,the micro-opto-electromechanical systems (MOEMS) have been widely used in optical communication,optical display,data storage,optical sensing and etc..Compared with the traditional pressure sensors,the optical pressure sensor based on MOEMS has some unique advantages. In this paper,the structures,operation principles and fabrication processes of various MOEMS pressure sensors are described mainly.Finally,the structure and fabrication process of a MOEMS pressure sensor array is presented in brief.