微机械光调制器激励机制的理论和实验研究

讨论了一种具有Fabry-Perot结构的新型微机械先调制器,该光调制器由表面微机械工艺制备。理论分析表明,正弦信号、带直流偏置的正弦信号和方波对光调制器的驱动结果是完全不同的。测量结果表明,微机械光调制器有一系列的固有频率。对正弦信号、带直流偏置的正弦信号和方波信号的测量结果显示,调制器的响应是对驱动力中各频率成分的响应,和理论分析符合得非常好。

Theoretical and Experimental Study on Driving Mechanism for Micromechanical Modulator

A new type of micromechanical optical modulator with a Fabry-Perot structure fabricated by the surface micromechanical processes is presented. The theoretical research shows that the effect of the driving signals of the sinusoidal wave and the sinusoidal wave with a bias and the square wave on the optical modulator is completely different. The measurement results show that the modulator has a series of resonant frequencies, and that if the modulator is driven by different signals, the frequency components in the driving signal will have different effects on the modulator, which agrees very well with the theoretical results.