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PSD安装倾斜误差对光斑定位影响的研究
引用本文:尚鸿雁.PSD安装倾斜误差对光斑定位影响的研究[J].半导体光电,2010,31(2).
作者姓名:尚鸿雁
作者单位:上海海事大学,物流工程学院,上海200135
基金项目:上海市教委科技项目(06FZ019);;上海海事大学重点学科建设项目(XL0105)
摘    要:针对入射光能量为高斯分布时,位置敏感探测器(PSD)安装倾斜影响光斑定位的问题,建立了光斑定位畸变误差数学模型,并进行了仿真。仿真结果表明,光斑定位畸变误差随着PSD倾斜角度、高斯光束的束腰半径和与光束束腰之间的距离的增加而增加,其中前两项的变化对PSD光斑定位精度的影响在小范围内可以忽略,最后一项影响较大。所建立的光斑定位畸变误差模型及仿真结果为PSD的实际工程应用提供了有效的理论依据。

关 键 词:高斯分布  PSD  光斑定位  畸变误差  仿真

Research of the Impact of Slanting Installation Error of PSD on Spot Position
SHANG Hongyan.Research of the Impact of Slanting Installation Error of PSD on Spot Position[J].Semiconductor Optoelectronics,2010,31(2).
Authors:SHANG Hongyan
Affiliation:Logistics Engineering Institute of Shanghai Maritime University;Shanghai 200135;CHN
Abstract:For the problem of the impact of the installation of PSD on spot position, when the energy of incident light is a Gaussian distribution, a mathematical model of this distortion error of the spot position is established and the simulation is done. Some conclusions show that the distortion error of the spot position increases with the increasing slanting angle of PSD surface, beam waist radius and distance between PSD and beam waist position. The effect on spot positioning precision of the foregoing two items...
Keywords:Gaussian distribution  PSD  spot position  distortion error  simulation  
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