| 基于硅基微环谐振器的折射率传感研究综述 |
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| 引用本文： | 徐亚萌,孔梅.基于硅基微环谐振器的折射率传感研究综述[J].半导体光电,2020,41(4):455-463. |
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| 作者姓名： | 徐亚萌 孔梅 |
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| 作者单位： | 长春理工大学 理学院 光电信息科学与技术系, 长春 130022 |
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| 基金项目： | 国家自然科学基金项目(61905022).通信作者:孔梅E-mail:kongmei@cust.edu.cn |
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| 摘 要： | 片上折射率传感在安全检查、环境监测、健康诊断和食品监督等领域有着广阔的应用前景,基于硅基微环谐振器的折射率传感器具有微型化、集成化等优点,已成为当前研究的热点。文章首先对硅基微环谐振器的折射率传感探测原理进行了介绍,然后依据探测原理分类梳理了国内外硅基微环折射率传感的最新研究进展,并分析总结了不同传感探测原理的优缺点,最后讨论了现阶段硅基微环谐振器在折射率传感中存在的问题和未来的发展方向。
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| 关 键 词： | 微环谐振器 波导器件 折射率传感 Fano谐振 包络谱传感 |
| 收稿时间： | 2020/4/24 0:00:00 |
Research Progresses of Refractive Index Sensing Based on Silicon-on-Insulator Microring Resonators |
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| XU Yameng,KONG Mei.Research Progresses of Refractive Index Sensing Based on Silicon-on-Insulator Microring Resonators[J].Semiconductor Optoelectronics,2020,41(4):455-463. |
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| Authors: | XU Yameng KONG Mei |
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| Affiliation: | Department of Information Science and Technology, School of Science, Changchun University of Science and Technology, Changchun 130022, CHN |
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| Abstract: | On-chip refractive index sensing has broad application prospects in the fields of safety inspection, environmental monitoring, health diagnosis, food supervision, etc. Currently, the microring resonator refractive index sensor based on silicon-on-insulator platform has become a research hot spot due to its capacities on miniaturization and integration. In this paper, its principles are introduced firstly, and then, the latest research progresses in and abroad are sorted out according to the principles of detection, and also the advantages and disadvantages are analyzed and summarized simultaneously. Finally, the existing problems and future development trends of refractive index sensing based on silicon-on-insulator microring resonators are discussed. |
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| Keywords: | microring resonator waveguide devices refractive index sensing Fano resonance envelope spectrum sensing |
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