| 玻璃微透镜阵列的制作工艺研究 |
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| 引用本文： | 叶嗣荣,周家万,刘小芹,钟强,黄绍春,赵文伯.玻璃微透镜阵列的制作工艺研究[J].半导体光电,2011,32(2):216-219. |
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| 作者姓名： | 叶嗣荣 周家万 刘小芹 钟强 黄绍春 赵文伯 |
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| 作者单位： | 重庆光电技术研究所,重庆,400060;无锡中微掩模电子有限公司,江苏,无锡,214135;重庆矢崎仪表有限公司,重庆,400041 |
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| 摘 要： | 对以玻璃为基材的微透镜阵列的制作工艺进行了研究,得出了影响微透镜阵列制作的三个主要因素:玻璃组分、腐蚀方法以及抗蚀掩模层材料。并通过实验详细分析了这三者对实验结果的影响。根据分析结果,选择合适的材料和工艺方法,获得了效果较好的玻璃微透镜阵列,为玻璃微透镜阵列的制作提供了依据和方法。
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| 关 键 词： | 微透镜阵列 多层抗蚀掩模 玻璃 腐蚀 |
Research on the Fabrication of Glass Microlens Array |
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| YE Sirong,ZHOU Jiawan,LIU Xiaoqin,ZHONG Qiang,HUANG Shaochun,ZHAO Wenbo.Research on the Fabrication of Glass Microlens Array[J].Semiconductor Optoelectronics,2011,32(2):216-219. |
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| Authors: | YE Sirong ZHOU Jiawan LIU Xiaoqin ZHONG Qiang HUANG Shaochun ZHAO Wenbo |
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| Affiliation: | YE Sirong1,ZHOU Jiawan2,LIU Xiaoqin1,ZHONG Qiang3,HUANG Shaochun1,ZHAO Wenbo1(1.Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN,2.Zhongwei Mask Electronics Co.,Ltd,Wuxi 214135,3.Chongqing Yazaki Meter Co.,Chongqing 400041,CHN) |
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| Abstract: | The fabrication of microlens array based on glass was studied and three factors of glass composition,etching method and mask material that affect the fabrication were introduced.The effects of the three factors were verified by experiments.According to the analysis,microlens array that meet the claims was manufactured by using suitable material and method.This provides proof and method for the fabrication of glass microlens array. |
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| Keywords: | microlens array multilayer mask glass etching |
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