|
|||||
|
|
| 硅微悬臂梁谐振器的电激电拾方法研究 | |
| 引用本文： | 刘月明,田维坚,刘君华.硅微悬臂梁谐振器的电激电拾方法研究[J].半导体光电,2003,24(6):389-391,414. |
| 作者姓名： | 刘月明 田维坚 刘君华 |
| 作者单位： | 1. 西安理工大学,机械与精密仪器工程学院,陕西,西安,710048;中国科学院西安光学精密机械研究所,陕西,西安,710068 2. 中国科学院西安光学精密机械研究所,陕西,西安,710068 3. 西安交通大学,电气工程学院,陕西,西安,710049 |
| 基金项目： | 陕西省教育厅资助项目;02JK155; |
| 摘 要： | 采用电热激励、压电拾取方法对硅微机械悬臂梁的谐振性能进行了实验研究。成功实现了对硅微悬臂梁谐振器前三阶振型的实验测试。电热激励利用在硅微机械悬臂梁表面优化设计的热激励电阻加以实现。为拾取硅微悬臂梁的微弱谐振信号,在硅微悬臂梁表面优化设计并制作了压敏电阻全桥,利用压敏电阻的压电效应实现对谐振微弱信号的拾取。 |
| 关 键 词： | 硅微机械悬臂梁 电热激励 压电拾取 谐振特性 |
| 文章编号： | 1001-5868(2003)06-0389-03 |
| 修稿时间： | 2003年5月26日 |
Electro-thermally Excited Silicon Microcantilever Resonator Using Piezo-resistor Detection Method |
|
| LIU Yue-ming.Electro-thermally Excited Silicon Microcantilever Resonator Using Piezo-resistor Detection Method[J].Semiconductor Optoelectronics,2003,24(6):389-391,414. | |
| Authors: | LIU Yue-ming |
| Affiliation: | LIU Yue-ming~ |
| Abstract: | The resonant characteristics of the silicon micro-cantilever resonator were investigated under electro-thermal resistor excitation. The weak resonant signal was picked up by piezo-resistor Wheatstone bridge designed and fabricated on the silicon micro-cantilever. The first three resonant modes were successfully detected by using above exciting and sensing method. The resonant characteristics of the silicon micro-cantilever are useful for further applications in micro-electro-mechanical systems. |
| Keywords: | silicon micro-cantilever electro-thermal excitation piezo resistor detection resonant characteristics |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |