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Substrate smoothing using gas cluster ion beam processing |
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| Authors: | L P Allen D B Fenner V Difilippo C Santeufemio E Degenkolb W Brooks M Mack J Hautala |
| Affiliation: | (1) Epion Corporation, 37 Manning Road, 01821 Billerica, MA |
| Abstract: | |
| Keywords: | Surface smoothing gas cluster ion beam surface modification |
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