Silicide formation in co-deposited TiSix layers: The effect of deposition temperature and Mo |
| |
Authors: | S Ohmi R T Tung |
| |
Affiliation: | (1) Bell Labs, Lucent Technologies, 600 Mountain Ave., 07974 Murray Hill, NJ |
| |
Abstract: | The silicide reaction in co-deposited TiSix layers on single crystal and pre-amorphized Si has been studied in detail. Both the co-deposition ratio and the co-deposition
temperature were found to have a strong effect on the formation of the C54-TiSi2 phase in these films. An unusual dependence of the sheet resistance on the co-deposition ratio was observed for films deposited
at room temperature and those deposited at 400°C: the C54-TiSi2 phase forms more easily for layers deposited at 400°C in the co-deposition ranges x∼0 and x>1.5, while it forms more easily
for layers deposited at room temperature in the co-deposition ratio range of x∼0.2–1.5. These dependencies are explained by
the formation of crystalline silicide phase(s) with composition close to the co-deposition ratio. With a Si rich ratio, the
C49-TiSi2 phase forms at 400°C with very small grain size, which facilitates the C54-TiSi2 phase formation. The initial reaction of Ti-rich layer deposited at 400°C involves the formation of metal rich silicide,
which impedes the formation of the C54-TiSi2 phase. An ultra-thin MoSi2.0 layer (<0.5 nm) was found to promote the formation of the C54-TiSi2 phase in layers co-deposited at room temperature, but it showed little effect on layers co-deposited on pre-amorphized substrates
at elevated temperature. |
| |
Keywords: | TiSi2 co-deposition phase transformation sheet resistance TEM |
本文献已被 SpringerLink 等数据库收录! |
|