Properties of phosphorus-doped (Zn,Mg)O thin films and device structures |
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Authors: | Y W Heo Y W Kwon Y Li S J Pearton D P Norton |
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Affiliation: | (1) Department of Materials Science and Engineering, University of Florida, 32611 Gainesville, FL |
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Abstract: | The properties of phosphorus-doped (Zn,Mg)O polycrystalline and epitaxial thin films are described. The as-deposited (Zn,Mg)O:P
films are n type with high electron carrier density. High resistivity is induced in the films with moderate temperature annealing,
which is consistent with suppression of the donor state and activation of the deep acceptor. The resistivity of the as-deposited
and annealed film is an order of magnitude higher than similar samples with no Mg, consistent with a shift in the conduction
band edge relative to the defect-related donor state. The capacitance-voltage characteristics of annealed metal/insulator/P-doped
(Zn,Mg)O structures in which the (Zn,Mg)O is polycrystalline exhibit p-type polarity. In addition, multiple polycrystalline
devices comprising n-type ZnO/P-doped (Zn,Mg)O thin-film junctions display asymmetric I–V characteristics that are consistent
with the formation of a p-n junction at the interface, although the ideality factor is anomalously high. |
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Keywords: | Zinc oxide wide bandgap semiconductor (Zn Mg)O phosphorus doped |
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