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| 内表面粗糙度测量仪 | |
| 引用本文： | 徐彧,徐继麟,廖俊必,陈继忠,李京.内表面粗糙度测量仪[J].激光与光电子学进展,2002,39(4):30-33. |
| 作者姓名： | 徐彧 徐继麟 廖俊必 陈继忠 李京 |
| 作者单位： | 1. 电子科技大学电子工程学院,成都,610065 2. 四川大学测控系,成都,610065 3. 中国科学院电工研究所,北京,100080 4. 青岛大学计算机系,青岛,266071 |
| 摘 要： | 介绍了一种基于光散射原理的便携式内表面粗糙度测量仪。它利用半导体激光器为光源,用光电二极管阵列接收经粗糙表面调制的散射光带,通过测量该散射光的光学特征值,得出粗糙度参数。仪器的测量范围R8为0.005~1．6μm,测量相对误差δ＜5%,重复测量不稳定性小于±2%。可以对多种机械加工零件的内外表面进行非接触在线检测。 |
| 关 键 词： | 表面粗糙度测量仪 光散射 表面粗糙度 在线检测 |
| 收稿时间： | 2001/4/17 |
Inside Surface Roughometer |
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| XU Yul XU Ji-lin LIAO Jun-bi CHEN Ji--zhong LI JingDept.of Eectronic Engineering,University of Electronic Science and Technology,Chengdu lDept.of Measurement and Control Engineering,Sichuan University,University,Chengdu lInstitute of El.Inside Surface Roughometer[J].Laser & Optoelectronics Progress,2002,39(4):30-33. | |
| Authors: | XU Yul XU Ji-lin LIAO Jun-bi CHEN Ji--zhong LI JingDeptof Eectronic Engineering University of Electronic Science and Technology Chengdu lDeptof Measurement and Control Engineering Sichuan University University Chengdu lInstitute of El |
| Affiliation: | XU Yul XU Ji-lin1 LIAO Jun-bi2 CHEN Ji--zhong3 LI Jing41Dept.of E1ectronic Engineering,University of Electronic Science and Technology,Chengdu 6l00652Dept.of Measurement and Control Engineering,Sichuan University,University,Chengdu 6l00653Institute of El |
| Abstract: | The protable instrument discussed in the Present paper is based on the light scattering method. A laser diodeis used as light source and a linear photodiode array to record the light-scattering band, and the roughness parameters can begot through the measured charateristic optical value (sn). The apparatus is valid in a wide range of applications for on-line non-contact measurement of both inside and outside surface roughness with a measuring range of 0.005~l.6 μm, a measuringerror of δ<5% and a measuring repeatability of < ±2%. |
| Keywords: | light scattering surface roughness on-line meaurement |
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