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光互连的研究与新进展
引用本文:王军锋,李跃进,杨银堂.光互连的研究与新进展[J].激光与光电子学进展,2005,42(1):16-21,15.
作者姓名:王军锋  李跃进  杨银堂
作者单位:西安电子科技大学微电子研究所,西安,710071
摘    要:讨论了集成电路向高集成度、高工作频率和更小特征尺寸发展时,常规金属互连存在的问题以及光互连对大系统如多芯片组件(MCM)、单芯片系统(SOC)等互连时的潜在优势。介绍了光互连发展中的几种新技术,太位自由空间转换加速器网络(FAST-Net)、选择性重复填充转移光刻组装(PL-pack with SORT)、自组织光波网络(SOLNET)、质子纵深成形(DLP)及光互连性能优化(带宽、功耗等)的研究,最后给出光互连所面临的一些问题并展望了其发展前景。

关 键 词:光互连  特征尺寸  金属互连  MCM  多芯片组件  DLP  光刻  性能优化  FAST  工作频率
收稿时间:2004/8/9

Research and New Development in Optical Interconnection
WANG Junfeng LI Yuejin YANG Yintang.Research and New Development in Optical Interconnection[J].Laser & Optoelectronics Progress,2005,42(1):16-21,15.
Authors:WANG Junfeng LI Yuejin YANG Yintang
Abstract:This paper deals with some questions when integrated circuits continue to develop towards high-density , high operating frequency and scalable figure size, and the old metallic interconnection meets some difficulties and the optical interconnection have lots of potential solution in some large systems such as MCM and SOC. It introduces several new technologies (FAST-Net, PL-pack with SORT, SOLNET, DLP) and some research in optimizing the performances (bandwidth, power dissipation etc) during the development of optical interconnection, and presents some questions which optical interconnection is facing and anticipates its development perspective.
Keywords:optical interconnection free space accelerator for switching terabit networks photolithographic packaging with selectively occupied repeated transfer self-organized lightwave network feep lithography with protons bandwidth
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