基于适度光反馈自混合干涉技术的位移测量系统

基于适度光反馈自混合干涉(OFSMI)技术,设计了一种位移测量方法.该办法通过对自混合干涉信号的整数条纹部分进行计数和对小数条纹部分进行细分,实现大量程高分辨率的位移测量.对小数条纹分析时,运用数据拟合方法,找出干涉波形特征点与被测物位移之间的关系,从而实现对小数干涉条纹部分对应位移的测量.仿真分析和实验结果证明,此方法可对位移进行大量程高精度的测量,误差平均为0.83%.并通过设计算法对物体的任意运动轨迹进行重构.

Displacement Measurement Based on Moderate Optical Feedback Self-Mixing Interference

A displacement measurement method is designed base on the effect of moderate optical feedback self-mixing interference(OFSMI). The high-resolution and large-range measurement of displacement is achieved through taking count of the integral stripe and analyzing the fringe stripe in details. When analyzing the fringe stripe, the relationship between the characteristic of interference waveform and the displacement of the target object is found by using date fitting method. With the above approach, the displacement of the fringe stripe is measured. Simulation and experimentation result shows that this method is able to achieve high-resolution and large-range measurement of displacement. The average of error is 0.83%. The arbitrary moving trajectory of this object can be reconstructed exactly by designing algorithm.