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薄膜应力测量方法研究
引用本文:王成,张贵彦,马莹,肖孟超,钱龙生.薄膜应力测量方法研究[J].激光与光电子学进展,2004,41(9):28-32.
作者姓名:王成  张贵彦  马莹  肖孟超  钱龙生
作者单位:中国科学院长春光学精密机械与物理研究所,长春,130022
摘    要:总结了薄膜应力的一些测量方法。将经常使用的方法归纳为激光宏观变形分析法和X射线分析法。介绍了利用测量基片弯曲曲率的激光宏观变形分析法(包括激光干涉法和激光束偏转法)和品格变形的X射线衍射法等测量薄膜应力的理论依据及其测量原理,计算了各种测量方法的测量精度,X射线分析法的精度最高,其次是激光干涉法,而激光束偏转法的精度最低,分析了激光分析法和X射线分析法的优缺点。

关 键 词:X射线分析  薄膜应力  激光束  曲率  基片  偏转  激光干涉  测量精度  测量原理  变形分析
收稿时间:2004/3/11

Study of Thin Film Stress Measurements
WANG Cheng ZHANG Guiyan MA Ying XIAO Mengchao QIAN Longsheng.Study of Thin Film Stress Measurements[J].Laser & Optoelectronics Progress,2004,41(9):28-32.
Authors:WANG Cheng ZHANG Guiyan MA Ying XIAO Mengchao QIAN Longsheng
Abstract:Different kinds of thin film stress measurements are summarized. Here these measurements often used fall into laser macroscopic deformation analysis and X-ray analysis. The basis and the principle of thin film stress measurements are discussed, including the laser macroscopic deformation analysis (includes laser interference measurement and laser beam deflexion measurement) based on measuring the bending curvature of substrate and the X-ray diffraction measurement based on crystal lattice deformation. The accuracy of thin film stress measurements is calculated, and the X-ray analysis is the most accurate, then the laser interference measurement, and the laser beam deflexion measurement is the last. The advantage and the deficiency of laser macroscopic deformation analysis and X-ray analysis are summed up.
Keywords:optics thin film stress laser interference laser beam deflexion X-ray
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