| 无机激光热刻蚀材料的研究进展 |
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| 引用本文： | 李豪,耿永友,吴谊群. 无机激光热刻蚀材料的研究进展[J]. 激光与光电子学进展, 2011, 0(1): 15-21 |
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| 作者姓名： | 李豪 耿永友 吴谊群 |
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| 作者单位： | 中国科学院上海光学精密机械研究所中国科学院强激光材料重点实验室;中国科学院研究生院;黑龙江大学无机功能材料化学重点实验室(教育部); |
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| 基金项目： | 国家863计划(2007AA03Z412)资助课题 |
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| 摘 要： | 激光热刻蚀技术是近年发展起来的利用激光热刻蚀薄膜的热变化阈值特性突破光学衍射极限进行纳米图形制备的新技术,在亚波长纳米结构器件和高密度光盘母盘制造等领域具有广阔的应用前景.阐述了激光热刻蚀技术的基本原理和特点,以及对激光热刻蚀材料性质的要求,综述了相变型激光热刻蚀薄膜材料(包括硫系相变薄膜材料、金属亚氧化物薄膜材料和陶...
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| 关 键 词： | 光数据存储 无机激光热刻蚀材料 激光热刻蚀技术 激光热刻蚀机制 |
Progress on Inorganic Laser Thermal Lithography Materials |
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| Li Hao, Geng Yongyou Wu Yiqun. Progress on Inorganic Laser Thermal Lithography Materials[J]. Laser & Optoelectronics Progress, 2011, 0(1): 15-21 |
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| Authors: | Li Hao Geng Yongyou Wu Yiqun |
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| Affiliation: | Li Hao1,2 Geng Yongyou1 Wu Yiqun1,3(1Key Laboratory of Material Science and Technology for High Power Lasers,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China2Graduate University of Chinese Academy of Sciences,Beijing 100039,China3Key Laboratory of Functional Inorganic Material Chemistry,Ministry of Education,Heilongjiang UniversityHarbin,Heilongjiang 150080,China) |
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| Abstract: | Laser thermal lithography is a new technique developed in recent years,and is used in a number of areas including the manufacture of sub-wavelength nanostructure devices and high density optical disc mastering.Based on thermal change threshold effect of laser thermal lithography materials,the pattern size less than the optical diffraction limit can be fabricated.The fundamental principle,characteristics and requirements for the laser thermal lithography materials are presented.Then the latest research of th... |
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| Keywords: | optical data stroage inorganic laser thermal lithography materials laser thermal lithography technique laser thermal lithography mechanism |
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