| 用sol-gel法在不锈钢基片上制备TiO2薄膜 |
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| 引用本文： | 刘世军,王培英.用sol-gel法在不锈钢基片上制备TiO2薄膜[J].电子元件与材料,1999,18(6):5-6. |
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| 作者姓名： | 刘世军 王培英 |
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| 作者单位： | 华中理工大学,湖北,武汉,430074 |
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| 摘 要： | 介绍利用钛酸丁酯为前驱液， 用ｓｏｌ－ｇｅｌ法在不锈钢基片上制备ＴｉＯ２ 薄膜。研究分析了冰醋酸、乙酰丙酮等添加物对溶胶性能的影响，对制备在不锈钢基片上的ＴｉＯ２ 薄膜进行ＸＲＤ分析，并检测薄膜的阻－温特性、Ｖ－Ｉ特性、绝缘强度等电学特性。实验显示添加一定比例的Ｈ２Ｏ、冰醋酸、乙酰丙酮， 可以得到长时间不胶凝、性能稳定的溶胶，通过适当工艺， 能在金属基片上制备出致密、不开裂、电阻率为１０５ ～１０６ Ω·ｃｍ 的ＴｉＯ２ 薄膜。
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| 关 键 词： | 二氧化钛薄膜 溶胶-凝胶法 不锈钢基片 电学特性 |
Thin Film on Stainless Substrate by Sol-Gel Process |
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| LIU Shi-jun,WANG Pei-ying.Thin Film on Stainless Substrate by Sol-Gel Process[J].Electronic Components & Materials,1999,18(6):5-6. |
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| Authors: | LIU Shi-jun WANG Pei-ying |
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| Abstract: | ELECTRONIC COMPONENTS & MATERIALS (China), Vol 18, No 6, P 5 6 (Dec 1999) In Chinese TiO 2 thin film are prepared on stainless steel substrate by sol gel process with Ti(OBu) 4 as alkoxide precursor. The effects of chemical additives, such as H 2O, acetic acid and acetylacetone, on properties of TiO 2 sol are investigated. TiO 2 thin film on stainless steel substrate is analyzed by XRD. the electricity properties of film are examined . It is shown that a sol of long time gelation and good stability can be obtained by adding suitable chemical additives. Densified and nonflaw TiO 2 thin film can be obtained by adjusting the annealing process. (5 refs.) |
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| Keywords: | TiO_2 sol gel stainless steel substrate electric properties |
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